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Features
- Semi-conductor Process gas detection solution CVD & oxidation gases, Doping gases, Etching & chamber cleaning gases
- Intelligent-Type Gas Detector, having a Built-in Micro processor
- Continuous Measuring of Oxygen & Toxic Gas and Vapours by continuous sampling
- Excellent Measurement Sensitivity and Stability
- Warning, Alarm & Fault Relays
- Calibration Maintenance & Nominal Measurement Modes
- RS-485 MODBUS communication
- Local FND display
- Control and Set up by key Switch on the Front
- Built-in Sub miniature and High-Efficient Micro pump
- 3-wires connection
- 4-20mA Signal output
- Calibration by One Person and Easy Maintenance
Specification
| Product Specification |
| Sensor type |
Continuous auto sampling |
| Function |
Local FND display type Intelligent gas detector Transmitter type |
| Service |
Indoor locations Non-hazardous areas |
| Measuring range |
PPB, PPM & Vol.% Refer to Ordering Information (P.50) |
| Sensor life |
2 to 3 years typical |
| Accuracy |
± 3% of full scale |
| Response time |
T90 < 45 sec. |
| Zero drift |
Less than 3% of full scale per year |
| Suction flow method |
Electrical diaphragm pump |
| Flow rate |
0-2000 ml/min Max. |
| Warranty |
One year |
| Approval |
CE |
| Environmental specification |
| Operating Temperature range |
Electronics -40°C to 70°C Standard sensor -50°C to 80°C |
| Storage Temperature range |
-40°C to 70°C |
| Operating Humidity range |
5 to 100% RH |
| Operating Pressure range |
ATM. ± 10% |
| Mechanical specification |
| Wwight |
1.5kg |
| Material(housing) |
Steel |
| Material(Enclosure) |
PTFE |
| Mounting type |
Surface mount |
| Electrical specification |
| Input power |
24V.DC normal 18 to 27V.DC/230mA max. |
| Output signal |
4-20mA(600 ohms max. local 0 mA) Malfunction 2mA Setup mode 2mA Cailbration 0mA |
| Alarm signal |
2 x SPDT |
| Cable requirements |
3-wire shield cable. Max distance 2500M |
| Digital communication |
RS-485 MODBUS Stop Bits: 1 |
| Baud Rate |
9600 |
| Parity |
Even |
| Date Bits |
8 |
Dimension

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